What is Molecular Layer Deposition

MLD Molecular Layer Deposition:

The deposition of hybrid (polymer-inorganic) coatings it is also possible by using a variation of the ALD technique. Molecular Layer deposition (MLD) in which following the same sequential deposition routine than in ALD, a molecular fragment is deposited in one of the cycles. This MLD modality is very useful to deposit polymeric chains.

 

Example: using trimethylaluminum (TMA) and Ethylene glycol (EG) as reactants, the MLD of alucone organic−inorganic polymers can be achieved. It is also posible to tune the chemical and physical properties of these organic−inorganic polymers by varying their organic-inorganic constituents.

 

References

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