What is Molecular Layer Deposition

MLD Molecular Layer Deposition:

The deposition of hybrid (polymer-inorganic) coatings it is also possible by using a variation of the ALD technique. Molecular Layer deposition (MLD) in which following the same sequential deposition routine than in ALD, a molecular fragment is deposited in one of the cycles. This MLD modality is very useful to deposit polymeric chains.


Example: using trimethylaluminum (TMA) and Ethylene glycol (EG) as reactants, the MLD of alucone organic−inorganic polymers can be achieved. It is also posible to tune the chemical and physical properties of these organic−inorganic polymers by varying their organic-inorganic constituents.



  • S.M. George. Atomic Layer Deposition: An Overview. Chem. Rev. 2010, 110, 111–131
  • R. W. Johnson, A. Hultqvist, S. F. Bent. A brief review of atomic layer deposition: from fundamentals to applications Materials Today 17, 5, 2014
  • A. J. M. Mackus, A. A. Bol, W. M. M. Kessels. The use of atomic layer deposition in advanced nanopatterning. Nanoscale, 2014,6, 10941-10960
  • S.M. Lee, E. Pippel, U. Gösele, C. Dresbach, Y. Qin, C. V. Chandran, T. Bräuniger, G. Hause, M. Knez. Greatly Increased Toughness of Infiltrated Spider Silk. Science (2009) 324, 5926,488-492.
  • J. Hämäläinen, M. Ritala, M. Leskelä. Chem. Mater., 2014, 26 (1), 786–801.
  • M. D. McDaniel, T. Q. Ngo, S. Hu, A. Posadas, A. A. Demkov, John G. Ekerdt. Appl. Phys. Rev. 2, 041301 (2015)
  • C.W. Kung, J. E. Mondloch, T. C. Wang, W. Bury, W. Hoffeditz, B. M. Klahr, R C. Klet, M. J. Pellin, O. K. Farha, J.
  • T. Hupp. ACS Appl. Mater. Interfaces, 2015, 7 (51), pp 28223–28230 ACS Appl. Mater. Interfaces, 2015, 7 (51), 28223–28230