Linköping, Sweden, 11 – 14 June, 2017

EuroCVD-Baltic ALD  Conference, Co-organized with the COST action HERALD

The meeting will be organized at the Konsert och Kongress venue in the heart of the city, Linköping, Sweden.

Topics for this conference include:

  • Precursors (design, synthesis and delivery)
  • Modelling (surface, gas phase, thermo chemistry, quantum chemistry, multi scale)
  • Process Equipment (reactors)
  • Energy Enhanced processes (Plasma, Hot wire, Photon)
  • Nanomaterials (particles, 2D-materials, nano structures)
  • In-situ monitoring (QCM, Ellipsometry, IR, syncrotron)
  • Oxides (TCO, high-k, hard coatings, thermal barriers)
  • Nitrides (semiconductors, conductors, hard coatings)
  • Carbides (hard coatings, semiconductors)
  • Elemental films (metals, amorphous carbon)
  • Emerging materials (hybrid MLD/ALD, sulfides)