Linköping, Sweden, 11 – 14 June, 2017
EuroCVD-Baltic ALD Conference, Co-organized with the COST action HERALD
The meeting will be organized at the Konsert och Kongress venue in the heart of the city, Linköping, Sweden.
Topics for this conference include:
- Precursors (design, synthesis and delivery)
- Modelling (surface, gas phase, thermo chemistry, quantum chemistry, multi scale)
- Process Equipment (reactors)
- Energy Enhanced processes (Plasma, Hot wire, Photon)
- Nanomaterials (particles, 2D-materials, nano structures)
- In-situ monitoring (QCM, Ellipsometry, IR, syncrotron)
- Oxides (TCO, high-k, hard coatings, thermal barriers)
- Nitrides (semiconductors, conductors, hard coatings)
- Carbides (hard coatings, semiconductors)
- Elemental films (metals, amorphous carbon)
- Emerging materials (hybrid MLD/ALD, sulfides)